Tracking Sputtered Atoms: a DIY Approach
Date & Time
Monday, November 15, 2021, 10:00 AM - 11:00 AM

The deposition rate during magnetron sputtering is a key parameter for many applications. Reasonably accurate predictions can be made by Monte Carlo modelling of the trajectories of the sputtered atoms from their source to the landing position. The output of these models is rich in information and as an example also provides the energy and angle of incidence of the sputtered atoms. This event will provide a brief overview on the use of the free software package SiMTRA to obtain this information. After reviewing the basics of magnetron sputtering, a few practical examples will be demonstrated which will enable you to simulate your own set-up and gain a deeper understanding of your process.

Diederik Depla - Ghent University
Wilmert De Bosscher/Frank Zimone