Josh Pankratz, Advanced Energy Industries, Inc., Fort Collins, CO
As film quality requirements continue to increase, allowable particle size from arcs is also decreasing. Controlling the energy delivered into the process due to an arc is of importance. Depending on the process, different amounts of arc energy are needed to stabilize the process. There are several common methods to measure arc energy. Analyzing arc energy measurements of on different types of arcs and some common parameters used to manage the energy delivered during an arc.