Date
Friday, May 7, 2021
Time
4:00 PM - 4:20 PM (EDT)
Name
New DRP Approach for High Speed Deposition Processes
Speakers
Craig Rappe - Advanced Energy Industries, Inc.
Description
*Craig Rappe, Dave McAninch, Josh Pankratz, Advanced Energy Industries, Inc., Fort Collins, CO
Increased line speed, the removal of floating anodes and lower temperatures have all been realized in a production machine using an expanded configuration of Dynamic Reverse Pulsing (DRP) with bipolar pulsed DC power. This paper gives an overview of the initial machine setup, the configuration changes implemented and the results that were realized. This work is a new variant of the original DRP power configuration (first published at SVC in 2015 by Douglas Pelleymounter).
Session Type
Large Area Coatings