*Colin Quinn¹, Brett Buchholtz¹, Dale Ness², Alan Streater³

¹Plasma Process Group, Windsor, CO; ²Dale Ness Designs, Boulder, CO; ³Boulder Optical Design, Boulder, CO

A broadband optical monitor system has great versatility and can accurately control layers for a wide variety of coating types, with few design constraints and without extensive preparation. The most important characterization of a broadband optical monitor system is layer thickness accuracy, which depends on both the quality of the optical monitor system and on the quality of the chamber. We will discuss how accuracy is characterized and how we achieve sub-nm layer control in our systems.