Wednesday, May 5, 2021
4:00 PM - 4:20 PM (EDT)
Cross Platform Integration of Differing Manufacturers’ Cryogenic Pumps on the Same Process Tool
Frank Jankowsky III - SynSysCo

Frank P. Jankowsky III, SynSysCo, Montrose, CO
Cross platform integration of differing manufacturers’ cryogenic pumps on the same process tool has been severely limited due to differing electrical and communications requirements of each manufacturer’s cryopump which require different helium compressors and different I/O to Tool host controllers. This restriction has limited an End User’s ability to incrementally upgrade processes by installing higher performance pumps that are available from competing suppliers. Typically, tool cryogenic pump upgrades require a full change out of all the cryopumps on the tool. The product innovation is an OMNI® Helium Compressor that enables the cross-platform integration and operation of multiple manufacturers’ cryogenic pumps on the same tool at the same time. The OMNI® has the electrical components, communication components, and helium supply components to simultaneously operate cryogenic pumps of different manufacturers — either as a singular group by manufacturer, or by mixing cryogenic pumps of multiple manufacturers on the same tool at the same time. This enables, for example, the installation of a supplier “A” higher performing process chamber pump in regard to pumping speed and carrying capacity, while keeping a satisfactorily performing supplier “B” cryopump on a load lock or transfer chamber, while driving both pumps with a single helium compressor.

Session Type
Vendor Innovator Showcase