Monday, May 3, 2021
11:30 AM - 11:50 AM (EDT)
Inline Magnetron Sputtering for Highly Demanding Laser-Optical Coatings
Daniel Glöß - Fraunhofe-Institute for Organic Electronics, Electron Beam and Plasma Technology FEP

*Daniel Gloess1, Andy Drescher1, Ullrich Hartung1, Manuela Junghähnel1, Peter Frach1, Martin Ebert2, Hagen Sahm3
1Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany; 2Laseroptik GmbH, Garbsen, Germany; 3SeeReal Technologies GmbH, Dresden, Germany
The PreSensLine inline coating system at Fraunhofer FEP is ideally suited for the high-precision coating of substrates up to 650 x 750 mm2 with thicknesses up to 120 mm. In this paper, investigations on the deposition of multilayer coatings for future laser applications are presented. One example is an investigation on large laser mirrors for high-power laser systems. The layer system of Ta2O5 and SiO2 in (HL)14H design (29 layers) was optimized for R>99.8% (unpolarized) at 803 nm and 45° incidence angle. The samples were analyzed regarding optical function, absorption, scattering, hardness, mechanical stress, roughness, particle density, and laser-induced damage threshold (LIDT). In particular, very low absorption and low mechanical stresses demonstrate the suitability of the process for coating future highly demanding laser components. Further investigations are on layer systems needed for backlights of holographic displays using three color laser illumination. By applying laterally graded precision optical filters with dimensions of the display size, very compact backlight designs are feasible.

Session Type
Optical Coatings