Marvin Odisho, Halocarbon, Peachtree Corners, GA
Fluorinated lubricants are widely used in vacuum coating processes (ALD, PVD, and CVD). These types of lubricants exhibit low vapor pressure, chemical inertness, effective lubrication, and sealing. Additionally, fluorinated lubricants provide resistance to degradation and outgassing, support reliable operation under high vacuum, and minimize contamination in these advanced thin film deposition techniques.
The following work examines the chemical stability of polychlorotrifluoroethylene (PCTFE) oils to Lewis acid attack versus conventional perfluoropolyether (PFPE) oils in vacuum pump applications. Due to their oxygen free molecular structure, PCTFE oils exhibit greater stability towards Lewis acid induced degradation than PFPE. Experimental data shows that PCTFE oils exhibit zero weight loss, no reduction in viscosity, no change in pH or acidity, encapsulate volatile organic compounds, and do not emit discernable fumes or acidic odors. Under identical conditions, PFPE Y & K fluids suffered significant weight loss and viscosity reduction – a display of drastic performance decline. These findings highlight the exceptional stability and acid resistance of PCTFE oils, supporting their stability for demanding vacuum pump applications where chemical resistivity is critical to the process and finished product.