Asim Mirza, Stephen Copplestone, Julian Beyer, Paul Nizenkov, boltzplatz - numerical plasma dynamics GmbH, Stuttgart, Germany
In this presentation, we discuss the advantages of using open-source simulation tools for modeling electron beam (E-beam) processes, with a focus on the freely available plasma simulation framework PICLas. Open-source software offers transparency, flexibility, and long-term sustainability, making it an attractive alternative to proprietary tools for both research and industrial applications.
An overview of the PICLas tool chain is provided, illustrating how electron beam processes can be modeled from particle emission to beam transport under the influence of electric and magnetic fields. The Particle-in-Cell (PIC) method, combined with Monte Carlo Collision (MCC) modeling, enables the self-consistent simulation of charged particle dynamics as well as interactions with background gases. Particular emphasis is placed on practical modeling strategies that balance physical fidelity and computational cost.
It is demonstrated that, through appropriate model simplifications, fast simulation turnaround times can be achieved while maintaining sufficient physical accuracy for engineering purposes. This enables efficient parameter studies directly on the computer, supporting tasks such as beam optics optimization, sensitivity analysis, and process window exploration. Example use cases relevant to industrial E-beam systems are presented to highlight how simulation-driven insight can reduce experimental effort and accelerate development cycles.
By the end of the talk, attendees will gain a clear understanding of how open-source tools like PICLas can be integrated into industrial workflows for electron beam process modeling. The combination of physical transparency, adaptability, and computational efficiency makes open-source particle simulations a powerful resource for advancing E-beam technologies.