Sheldon Wayman, INFICON, East Syracuse, NY
Long and demanding PVD processes place extraordinary expectations on monitoring equipment. As films become thicker, coatings more complex, and cycle times longer, the pressure on sensors to deliver stable and uninterrupted measurement grows significantly. The INFICON RSH-800 Rotary Sensor Head was created to meet these challenges with a design that gives advanced thin film manufacturers a new level of confidence in continuous deposition environments.
RSH-800 combines a multi crystal technology with a robust and thermally protected housing to maintain a steady rate monitoring even as chamber conditions evolve over time. Instead of allowing heat, coating buildup, or extended process duration to degrade performance, the sensor is engineered to preserve consistency from the beginning of the process to the end. This stability helps users achieve uniform films, predictable results, and smoother production flow during complex optical coating applications.
Equally important, RSH-800 is designed to support the realities of high throughput manufacturing. Fast on-site crystal exchange, smooth pneumatic indexing, and clear position feedback help keep operations moving with minimal disruption. Flexible mounting options, supported by adjustable and fixed flange accessories, allow the sensor to integrate cleanly into a variety of chamber geometries across optical, display, and industrial vacuum coating systems.
This presentation will introduce the RSH-800 design, highlight the performance advantages that matter most in PVD, and demonstrate how its engineering enables higher uptime, improved film quality, and more efficient processes in today’s most demanding thin film environments.