Jin Yao, Moritz Riede, Henry Snaith, University of Oxford, Oxford, United Kingdom
In this talk, we present a state-of-art high vacuum-based deposition cluster tool housed in Physics at the University of Oxford, UK. The system was designed by Oxford team and Angstrom Engineering, and manufactured and delivered by A.E in 2021.
The fully automated cluster tool is consisting of 2 organics (both 8 sources), a dedicated perovskite (8 sources), a sputtering (4 sources), an atomic layer deposition (6 sources, Picosun) and a recently added Ultraviolet Photoelectron Spectroscopy (UPS) that connected by high vacuum. It also allows the users to flip the substrates inside the vacuum and exchange shadow masks in the deposition chambers (except ALD) to fulfil the device fabrication structures as designed with the AERES controlling interface. Since the officially open of the NTCF on November 2022, we have demonstrated to fabricate complex thin film solar energy protypes, e.g. perovskite (PSC) & organic PV (OPV) and tandem devices.
We will also present some recent outputs in top journals and some collaborations and interesting applications of the NTCF thanks to the powerful cluster tool.