C. Muratore¹, N. R. Glavin^2
1University of Dayton, Dayton OH
²Air Force Research Laboratory, Wright-Patterson AFB, OH
Microelectronic sensor devices for detection of airborne inhalation hazards, biological agents such as viruses, and critical elements were fabricated using a combination of sputtering and laser illumination for both patterning and crystallization. An overview of the processes used to make >1M chips a day and performance for the different applications are presented. For all three applications, the sensor devices outperform the current state of the art by > 1,000X in terms of both limits of detection and manufacturing costs. The demonstrated performance is the result of architecture optimization with an ultra-thin semiconducting transducer compatible with selective capture agents making sensors selective for detection of target elements in the range of use environments associated with each of type of detection target.