Name
Next-Generation Industrial Vacuum Coating Equipment: Advancing Semiconductor TGV, Precision Optics, and Battery Technologies through Robotic Integration
Description

Zhiming Luo, Guangdong Huicheng Vacuum Technology Co., Ltd, China
As global manufacturing pivots toward greener and more intelligent processes, the demand for high-performance thin-film materials has expanded significantly from precision optics to semiconductor packaging and new energy sectors. HCVAC is at the forefront of this evolution, developing next-generation vacuum coating equipment platforms designed for superior process repeatability and large-scale industrial production.
This presentation will highlight our core equipment’s innovative applications across four critical sectors:

  • Semiconductor Packaging: Advanced metallization deposition systems for TGV (Through Glass Via) with ultra-high aspect ratios.
  • Precision Optics: Ultra-stable sputtering technologies that meet the most rigorous optical performance specifications.
  • New Energy Batteries: High-efficiency coating solutions for battery components (such as composite current collectors), enhancing both energy density and safety.
  • Robotic Components: High-performance functional coatings engineered to enhance the wear resistance and durability of robotic precision parts.

A defining feature of our equipment platform is the deep integration of industrial robotic automation. By utilizing robotics for intelligent loading/unloading, automated target exchange, and in-vacuum substrate transfer, our systems achieve 24/7 continuous operational stability. This "Equipment + Process + Intelligence" synergy minimizes human interference, ensuring exceptional consistency and yield in vacuum environments. We will demonstrate how HCVAC’s integrated solutions empower partners to bridge the gap between cutting-edge R&D and high-volume industrialization.