Name
C-103 An Introduction to Physical Vapor Deposition Processes (Shah)
Date
Saturday, April 30, 2022
Time
9:30 AM - 5:30 PM
Description

This course is suitable for all seeking an introduction to Physical Vapor Deposition (PVD) processes and includes detailed descriptions of the hardware, systems, theory, and experimental details related to evaporation, sputtering, arc deposition, laser ablation, etc. This course also includes an introduction to the vacuum technology as relevant to PVD. Thus, it includes an introduction to vacuum science, pumps, vacuum measurement and control instruments, plasma and plasma characterization, etc. This course does not have any pre-requisite but some previous experience with any deposition technology or equipment is helpful.

Speakers
S Ismat Shah - University of Delaware
Location Name
Room 102A