The use of electron beams in cathode ray tubes, electron microscopy, and similar applications is widely known. Beyond this and despite of several advantages, the application of electron beams directly in the manufacturing process is less prominent. Thin and thick layers can be produced in vacuum with electron beams by evaporation and high-purity materials by melting. Furthermore, electron beam technology provides solutions for welding, thermal microprocessing and electron beam lithography, heat treatment, and beam assisted chemical techniques at both vacuum and atmospheric pressure. Current developments from all over the world are presented. The tutorial describes new technologies that are characterized by high productivity, low specific energy expenditure, improved economy of materials, and improved environmental design.

This comprehensive lecture of electron beam technology dedicated to teachers, students, and specialists in all related fields will demonstrate how electron beams can be used to solve problems in production engineering. Fundamental aspects, process characteristics and limitations, information on plant equipment and actual application are covered. A deeper insight into the coating technology by electron beam physical vapor deposition is given.