This one-day short course is intended for those who wish to understand and operate a residual gas analyzer (RGA), and a helium mass spectrometer leak detector (MSLD). The course will focus on operation, use, data analysis and interpretation, process control, leak detection, and problem solving using the RGA.

The construction and operation of each component part: ionizer, mass filter, and detector is explained. Decoding a real mass spectrum is not always easy. Here we discuss individual ionization processes and how they combine to form signatures (cracking patterns) for gases and vapors of practical interest. Numerous cracking patterns for useful gases, vapors, lubricants, pump fluids, and elastomers are described, as well as practical methods for identifying these sources when they are hidden within the mass analysis of real environments.

We describe how the RGA can be used as a leak detector with a range of tracer gases to test both small and very large chambers.

The description, operation, and practical aspects of using an MSLD are covered in detail, including an extensive compilation of Best Practices for both MSLD and RGA that have been collected from decades of personal use. Commercial software will not be covered; however, this course will give technologists the understanding and practical knowledge they need to operate commercial equipment, to solve problems, and to communicate and explain their results with assurance and confidence.