Gun-Hwan Lee1, Martynas Audronis2
1Korea Institute of Materials Science, Changwon, Korea
2Nova Fabrica Ltd., Ignalina, Lithuania
Ceramic coatings are pivotal in various industrial applications due to their exceptional mechanical, chemical, and biological properties. Among the coatings utilized, CrN, TiN, TiAlN, TiCrN, TiCrSiN, and hard carbon coatings (HCC) have gained prominence. These coatings are synthesized via the vapour-phase method using arc ion plating. However, despite their widespread use, ion plating techniques suffer from certain limitations, including macro-particle generation and challenges in accurately measuring deposition rates.
The Challenge - Measuring Deposition Rates In Situ: one critical hurdle in ion plating processes is the lack of a reliable real-time method for measuring deposition rates (in situ). To address this, our research team embarked on a journey to develop an innovative solution.
Leveraging Optical Emission Spectroscopy (OES): in our study, we harnessed the power of Optical Emission Spectroscopy (OES). We discovered a correlation between intensity and deposition rate by analysing the spectral peaks of vapour materials within the arc plasma. OES provided a non-invasive way to monitor the coating process as it unfolded.
Experimental Setup and Results: we conducted experiments using a pilot-scale arc ion plating system, focusing on three coatings: titanium (Ti), chromium (Cr), and chromium nitride (CrN). Here are the key findings:
1. The deposition processes of pure metal (Ti and Cr: 60μm target thickness) and nitride (CrN: 10μm target thickness) were conducted.
2. OES spectra were recorded for each process. Real-time deposition rate measurement values were obtained through OES analysis.
3. Actual layer thickness was measured using an α-step stylus. The target thickness was found to match the produced thickness well.
The work has been conducted by a consortium comprising Nova Fabrica Ltd., KIMS, and ICT Inc., committed to advancing deposition rate measurement technologies. By bridging the gap between theory and practical implementation, we aim to enhance the reliability and efficiency of ceramic coatings across diverse industrial contexts.