Kyle Moore, Advanced Energy Industries, Fort Collins, CO
As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent AMS II DC Power supplies deliver stable, repeatable power, regardless of process material or cathode design. This low-noise, water-cooled design with expanded operating range (150 A, 400 to 1000 V) increases the process capabilities and flexibility of tool installations. It also eliminates the need to maintain different configurations that are limited by operating current. Additionally, wide operating range and wide range mains voltage input simplify ordering. Water cooling specifications are maintained within industry standards for easy installation and reduced downtime.
AE’s proprietary Arc Management System (AMS) technology preserves film quality and repeatability, even under extreme arcing conditions. Automatic arc handling eliminates the need to adjust arc management parameters and controlled power recovery minimizes over-shoot and secondary arcs.
In addition, embedded PowerInsight by Advanced Energy^™ IOT platform acts as a flight recorder, capturing AE power delivery system performance and accelerating process characterization and troubleshooting.