Yinan Li^1,2, Ying-Hung Chen², Ping Yen Hesih², Ju-Liang He², Allan Matthews^1
1The University of Manchester, Manchester M13 9PL, United Kingdom
²Feng Chia University, Taiwan
Since the beginning of TBCs (thermal barrier coatings) history, YSZ (yttria-stabilized zirconia) has been selected as the major material to form TBC ceramic layer. Progress for their deposition techniques have also evolved for reliable quality consideration. Gas flow sputter (GFS) technique in this regard seemed to fit for TBC-YSZ deposition. This study aims to give a complete view of the GFS system build up for YSZ deposition and coating parameters evaluation, oxygen flow rate and deposition temperature, in particular, to reveal how the morphology and crystal structure can be affected by the coating parameters, ultimately to obtain feathery YSZ coatings for TBC applications. Moreover, a specific goal is to grow very thick feathery YSZ layer up to 250 μm.
Experimental results show that a 150 mm x 150 mm growth chamber has been facilitated for GFS-YSZ deposition. It is possible to grow very thick YSZ layer up to 250 μm with feathery morphology. By the morphological observation and crystal structure characterization, the obtained TBC-YSZ can be strongly affected by the coating parameters. Over a deposition temperature of 400℃, a tetragonal phase structure can be obtained. It is therefore strongly convincible that GFS-YSZ can ultimately be developed to move forward to next-generation TBC coating technique.