Dave Manko, Wolfgang Decker, Nick Franzer, Jason Hrebik, Kurt J. Lesker Company, Clairton, PA
The Kurt J Lesker Company has developed an innovative shutter design to be used in magnetron sputtering for significant reduction in cross contamination.
A full range of sizes are now available on Kurt J. Lesker Sputtering System.
Details of the design, overall function, and process performance will be provided along with test data.