Name
Inteleg® S EI – A Novel EIES Deposition Rate Controller
Date
Wednesday, May 8, 2024
Time
10:10 AM - 10:30 AM
Description

Martynas Audronis, Nova Fabrica Ltd., Ignalina, Lithuania
Inteleg® S EI represents a cutting-edge EIES (Electron Impact Emission Spectroscopy) technology designed for prolonged and accurate deposition rate measurement and control in high-vacuum-based evaporation processes. This innovative system ensures continuous, precise, and repeatable measurements, addressing the critical requirements of modern thin-film manufacturing.
Key Features:
• Uninterrupted Long-Term Measurement: Inteleg® S EI offers uninterrupted, reliable deposition rate measurement over extended periods, providing crucial stability for high-vacuum environments.
• Environmental Insensitivity: The technology demonstrates remarkable resilience to environmental factors, ensuring consistent performance in varying conditions.
• Multi-Material Detection: Equipped with a single detector capable of measuring multiple materials, Inteleg® S EI enables simultaneous detection of multiple materials.
• Gas Detection Capability: Beyond metals, the system can detect gases, expanding its applicability and offering valuable process insights.
• Extended Sensor Lifespan: Inteleg® S EI boasts a prolonged sensor lifetime, minimizing the need for frequent replacements and contributing to overall cost reduction.
• Full Automation: Facilitating the complete automation of evaporative film deposition processes, Inteleg® S EI significantly reduces maintenance and operation costs while optimising efficiency.
Economic Advantages:
Inteleg® S EI presents a cost-effective solution, leading to substantial end-user savings:
• Lower Maintenance Costs: Reduced need for sensor replacements and maintenance activities.
• Less Manufacturing Downtime: Enhanced system stability minimises downtime, ensuring continuous production.
• Lower Labor Costs: Automation capabilities reduce the need for constant manual intervention.
• Improved Economy and Efficiency: Inteleg® S EI contributes to enhanced overall process economy and efficiency.
Environmental Impact:
By enabling environmentally friendly thin-film manufacturing processes, Inteleg® S EI aligns with the industry's sustainability goals, providing a holistic solution for both economic and environmental considerations. Overall, this innovative technology sets a new standard for precision, reliability, and sustainability in thin-film deposition.

Speakers
Martynas Audronis - Nova Fabrica Ltd