Andris Voitkāns, GroGlass, Riga, Latvia
The challenge of magnetron sputtering on organic substrates is addressed in this study, focusing on refining process control for Aluminum Zinc Oxide (AZO) magnetron sputtering. Precise control over layer thickness and absorption is crucial for optical functional coatings. Introducing organic substrates into the vacuum chamber increases water vapor levels, impacting the sputtering speed from AZO targets and requiring a nuanced approach to process management. The study proposes utilizing Plasma Emission Spectra (PEM) for process recognition, integrating it into a feedback loop for AZO sputtering process parameters. This method helps identify critical operational states and adapt process parameters when transitioning between glass and organic substrates. By analyzing PEM the research aims to improve understanding of AZO magnetron sputtering dynamics and optimize process control when working with organic substrates, enhancing the efficacy and reliability of sputtering processes for precision optical coatings on organic substrates.