This tutorial is designed to provide participants with a comprehensive understanding of mass flow controllers (MFCs) and their application in thin film deposition processes. Participants will learn about the principles of MFC operation, different types of MFCs, and techniques for optimizing MFC performance in thin film deposition applications.

Course Objectives:

• 1. Gain a fundamental understanding of mass flow controllers and their role in thin film deposition processes.

• 2. Learn about the various types of MFCs and their unique characteristics.

• 3. Understand the principles of MFC operation and the factors that influence their performance.

• 4. Explore techniques for optimizing MFC performance in thin film deposition applications.

• 5. Troubleshoot common issues and challenges related to MFC usage in thin film deposition.