This day-long short course is intended for those who wish to understand the technology, science, and components required to operate high vacuum pumping systems. Mechanical pumps covered include rotary vane, lobe, claw, multistage lobe, dry piston, scroll, and screw. High vacuum pump and systems reviewed include diffusion, turbo, and cryo pump. We describe how materials are chosen for use in vacuum environments, and how they are used in valves, O-ring seals, and feedthroughs.

Water vapor is traditionally difficult to remove during the roughing cycle, and we provide effective methods for minimizing its effect on pumping time.

Modern vacuum systems are designed for diverse applications; a major distinction is their unique crossover pressure ranges in which pumping switches from rough to high vacuum operation—a concept that is not well appreciated. We describe how to calculate the correct crossover pressure range for each major pump type.

Practical advice is offered for operators, engineers, and maintenance personnel. The course highlights useful and informative “Best Practices” for operating complex vacuum systems, e.g., guidance that would have been acquired historically through mentoring by experienced colleagues. Rapid technical developments and frequent career changes or added responsibilities, have left both experienced and new technologists in need of a reliable and concise information source. >

The material in this short course is designed to replace the historic mentoring that is necessary to understand and operate modern vacuum deposition systems.