Name
Colloquium: HIPIMS--Facts and Fiction
Date
Thursday, May 22, 2025
Time
12:40 PM - 2:40 PM
Description

Moderator: Herbert Gabriel (PVT Plasma und Vakuum Technik GmbH)
Event Description: High Power Impulse Magnetron Sputtering (HIPIMS) was discovered 25 years ago and has become a disruptive technology within the vacuum coating field. Although HIPIMS has become a mainstay in the semiconductor and in several other industries, there are still many misconceptions regarding its benefits and limitations. The purpose of this colloquium is to pragmatically separate fact from fiction. As a disruptive technology the promise is tempered by perception and expectation. Our panel will address the following areas to concretely bring to light the potential and reality of HIPIMS.

1) Deposition rate
2) Ion energy/selection and plasma density
3) Productivity
4) Scalability challenges
5) Applications

We will dedicate 25 minutes to each area led by a short presentation followed by a roundtable question and answer period. At the end of the session, we’ll ask for further questions and comments.

Speakers
Ralf Bandorf - Fraunhofer IST
Arutiun P. Ehiasarian - Sheffield Hallam University
Herbert Gabriel - PVT Plasma und Vakuum Technik GmbH
Chu Liang Ho - Feng Chia University
Daniel Loch - TRUMPF Hüttinger GmbH & Co. KG
Ivan Shchelkanov - Starfire Industries LLC.