Stefan Saager, Ludwig Decker, Lars Klose, Bert Scheffel, Matthias Tenbusch, Burkhard Zimmermann, Fraunhofer Institute for Electron Beam and Plasma Technology FEP, Dresden, Germany
Since the 1960s, pioneering work in Electron Beam Physical Vapor Deposition (EB-PVD) of metal strips has led to the installation of numerous pilot and production plants worldwide. However, the demand for ongoing development in a variety of application areas remains strong. To meet the changing challenges of modern industry, multifunctional equipment is essential. In 2000, the innovative inline vacuum coating plant for sheets and metal strips called MAXI was set into operation at Fraunhofer FEP in Dresden, Germany, to address global research and development needs. This modular system, comprising eight chambers, allows for the sequential execution of different process steps and offers the flexibility to operate in both sheet-to-sheet and roll-to-roll modes. This results in more efficient, faster, and easier progress during the early stages of development, as well as a smoother process transfer for the upscaling. In celebration of MAXI's 25^th anniversary, we will provide an overview of the diverse research projects realized over the years — from metallurgy and semiconductor applications to cutting-edge solutions for today’s energy technologies. Additionally, we will discuss current modernization activities.