Craig Rappe, Jing Li, Sarah Williams, Advanced Energy Industries, Fort Collins, CO
Certain high-power sinewave technologies that have been used as the standard power delivery solution in the large area glass industry for over 20 years, such as Crystal, have become obsolete, presenting the challenge to learn new process parameters for different materials. Parts obsolescence, together with the requirements for higher accuracy, higher deposition rates and lower defects in layer stack, drive the retrofit to AE’s Ascent^® product portfolio for large area DC sputtering. Using PowerInsight by Advanced Energy^®, custom dashboards can be created for multiple power supplies to monitor and troubleshoot processes, enabling the user to make data driven decisions to refine process conditions and reduce operational costs. AE technological advancements and application support can help designers plan, test, qualify and integrate the latest power supply technologies into their systems. This presentation highlights Advanced Energy’s retrofit solutions.