Kenny Vernieuwe, Felix Mattelaer, Ignacio Caretti, Wilmert De Bosscher, Soleras Advanced Coatings, Deinze, Belgium
Sputtered oxide thin films hold enormous potential in a wide range of both mature and growing new applications, from energy-efficient glazing and advanced displays to next-generation energy generation and storage solutions. Their unique ability of tunable morphology, providing a desired combination of optical performance and electrical properties, makes them a key component for emerging technologies. Among the various deposition methods, sputtering of ceramic targets has proven to be a versatile and efficient technique for producing high-quality oxide thin films with tailored properties.
This study investigates the role of recently developed ceramic target materials in achieving high deposition rates, enhanced material utilization and improved film properties compared to traditional sputtering of metallic targets. Ceramic targets offer superior thin film stoichiometric control, ensuring precise composition of the deposited thin films. Furthermore, combining these targets with advanced sputtering and inline metrology equipment provide enhanced process stability, allowing to maintain film uniformity and composition in large area and industrial production environments. The introduction of easy-to-use process control tools as part of an advanced system software platform enables achieving and sustaining the desired performance of these thin films.
Our presented findings will highlight the immense potential of ceramic targets in advancing technologies for use in electrochromic devices, photovoltaic systems, and thin-film batteries. By enabling high-performance solutions, ceramic target-based sputtering addresses the growing demand for functional coatings in large-area applications. These innovations unlock new possibilities for scalable and sustainable technologies, making sputtered oxide thin films from ceramic targets and in combination with advanced magnetron and process capabilities a cornerstone for future advancements in materials science and engineering.