Rajiv Pethe, Liangren Li, Vital Chemicals, Cupertino, CA
Vital Materials is a global company providing materials across many industries including displays, photovoltaics, semiconductors etc. We provide materials such as metals, ceramics, semiconductors, and transparent conductive oxides. As the photovoltaic industry moves towards higher efficiencies and low-cost processes, this requires innovation of novel transparent conductive oxides. This presentation will cover comparison of sputtered films processed using 1%, 2%, and 3% ICO targets. All films were deposited in the same sputter system.