Tim Dubbs, Advanced Energy Industries, Inc., Milpitas, CA
Accurate temperature measurements in vacuum chambers present unique challenges due to changing emissivity, optical constraints, and environmental interferences. This presentation explores effective pyrometry techniques for overcoming these obstacles, including strategies for handling emissivity variations in coated surfaces and selecting optimal detector wavelengths and optics for precise readings. Considerations for vacuum feedthroughs and window materials are addressed to ensure signal integrity. Methods for mitigating stray radiation interference and implementing multi-pyrometer compensation techniques are also discussed, providing a comprehensive approach to reliable temperature measurement in vacuum environments.