This course covers topics of practical importance to those who presently use sputtering or who would benefit from an introduction to the technology. The emphasis is on developing an understanding of the underlying science and the factors that influence product throughput, coating quality and process robustness and reliability. Typical applications of various sputtering techniques are presented as well as the advantages and limitations of each. Relationships between the sputtering conditions and important film properties - such as microstructure, composition, stress, adhesion and the resulting mechanical, electrical, and optical characteristics - are discussed. The emphasis is on process and hardware considerations rather than the detailed material properties of the coatings. No prior background in sputtering is needed.

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